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Intellectual Property Law
: TinytechIPUS Patent 7514853 - Stress inverter MEMS resonator
This is another patent from Silicon Clocks teaching a solution to thermal expansion mismatch in MEMS structures. Claim 1 reads:
1. A MEMS structure, comprising:
a stress inverter member coupled with a substrate; and
a resonating member housed in said stress inverter member and suspended above said substrate.
Full post as published by TinytechIP on April 10, 2009 (boomark / email).
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